Laser Scales
DH25
Laserscale easily achieves measurement and control by ultra high resolution less than 1nm.
Sinusoidal wave of approx.138nm signal period is generated by a hologram scale with high diffraction efficiency and a high resolution detecting head based on grating interference method, strong against disturbance by air pressure or current, plus easy to install (BS series).
Features
High-accuracy, reflective Laserscale with signal wavelength of 250nm Ideal for low-profile stages, semiconductor back-end processing equipment and precision microscopes
Signal wavelength : 250nm
High accuracy : ±1μm/420n
High response speed : 700mm/s
Maximum resolution :0.03125nm
Available :with/without reference point
Completely non-contact design Return error is theoretically eliminated.
Scale :Blue plate glass/Low expansion glass
Thin head with thickness of 12mm
Supporting various resolutions and output modes(Depending on the interpolator connected.)
Special non-magnetic and vacuum-compatible models available
Specifications
| # | Specifications | Specifications |
|---|---|---|
| 1 | Model | BH25-RE / BH25-NE |
| 2 | Measuring length ： L(mm) | 30/70/120/170/220/270/320/370/420（Low expansion glass, Blue plate glass） |
| 3 | Overall length | Measuring length＋26ｍｍ |
| 4 | Max. travel length | Measuring length＋10ｍｍ |
| 5 | Accuracy（at 20℃） | ±0.5μｍ（30mm-170ｍｍ） ±1.0μｍ（220mm-420ｍｍ） |
| 6 | Grating pitch | 1.0μｍ |
| 7 | Signal pitch | 250nm |
| 8 | Light source | Semiconductor laser Wavelength 790nm Max. output6mW |
Gallery
